(HMDS)2ZrCl2

Dichlorobis[bis(trimethylsilyl)amino]zirconium

CAS Number 70969-28-7 IUPAC Name Dichlorobis[bis(trimethylsilyl)amino]zirconium Molecular Formula C12H36Cl2N2Si4Zr Average Mass 482.9

Form

solid

Appearance

off-white crystals

Assay (Purity)

Boiling Point

>100°C/0.5mmHg

Sensitivity

moisture

Signal

WARNING

Pictograms

Zirconium bis(hexamethyldisilazide) dichloride, Dichlorobis[bis(trimethylsilyl)amino] zirconium(IV), Dichlorobis[bis(trimethylsilyl)amindo] zirconium(IV), Zirconium bis[bis(trimethylsilyl)amide dichloride, Zirconium(4+) chloride trimethyl-N-(trimethylsilyl)silanaminide, C₁₂H₃₆Cl₂N₂Si₄Zr [((CH₃)₃Si)₂N]₂ZrCl₂

Other [ Zr ] compounds

BTBAS (99.999% - Si)

Bis(t-butylamino)silane

CAS Number 186598-40-3 IUPAC Name Bis(t-butylamino)silane Molecular Formula C8H22N2Si Average Mass 174.36

SiBr4 (99.9999% - Si)

Tetrabromosilane

CAS Number 7789-66-4 IUPAC Name Tetrabromosilane Molecular Formula SiBr4 Average Mass 347.7

HCDSO (99.999% - Si)

Trichloro (trichlorosilyloxy) silane

CAS Number 14986-21-1 IUPAC Name Trichloro (trichlorosilyloxy) silane Molecular Formula Cl6OSi2 Average Mass 284.89

HCDS (99.9999% - Si)

Hexachlorodisilane

CAS Number 13465-77-5 IUPAC Name Hexachlorodisilane Molecular Formula Si₂Cl₆ Average Mass 268.89

TEMAH

Hafnium tetrakis[ethyl(methyl)azanide]

CAS Number 352535-01-4 IUPAC Name Hafnium tetrakis[ethyl(methyl)azanide] Molecular Formula C12H32HfN4 Average Mass 410.9

TDMAT

Titanium(IV) tetrakis (dimethylazanide)

CAS Number 3275-24-9 IUPAC Name Titanium(IV) tetrakis (dimethylazanide) Molecular Formula C8H24N4Ti Average Mass 224.15

PDMAT

Pentakis-(dimethylamino)-tantalum(V)

CAS Number 19824-59-0 IUPAC Name Pentakis-(dimethylamino)-tantalum(V) Molecular Formula C10H30N5Ta Average Mass 401.33

Application areas