TDMAS (99.999% - Si)

N,N,N',N',N'',N''-Hexamethylsilanetriamine

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CAS Number 15112-89-7 IUPAC Name N,N,N',N',N'',N''-Hexamethylsilanetriamine Molecular Formula [(CH3)2N]3SiH Average Mass 161.32

Form

Liquid

Appearance

Colorless to light yellow

Assay (Purity)

99.8

Boiling Point

145-148°C

Sensitivity

Moisture, air

Signal

Danger

Pictograms

[(CH₃)₂N]₃SiH, Tris(dimethylamido)silane, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine

Other [ Si ] compounds

TMIn

Trimethylindium

CAS Number 3385-78-2 IUPAC Name Trimethylindium Molecular Formula (CH₃)₃In Average Mass 159.93

TMG

trimethylgallane

CAS Number 1445-79-0 IUPAC Name trimethylgallane Molecular Formula (CH₃)₃Ga Average Mass

POCl3

Phosphoryl trichloride

CAS Number 10025-87-3 IUPAC Name Phosphoryl trichloride Molecular Formula POCl3 Average Mass 153

NF3

Nitrogen trifluoride

CAS Number 7783-54-2 IUPAC Name Nitrogen trifluoride Molecular Formula NF3 Average Mass 71

TDEAHf

Tetrakis(diethylamino)hafnium

CAS Number 19962-12-0 IUPAC Name Tetrakis(diethylamino)hafnium Molecular Formula C16H40HfN4 Average Mass 467.01

Cp2HfCl2

Hafnocene dichloride

CAS Number 12116-66-4 IUPAC Name Hafnocene dichloride Molecular Formula C10H10Cl2Hf Average Mass 379.58

TDEAZr

Tetrakis(diethylamido)zirconium

CAS Number 13801-49-5 IUPAC Name Tetrakis(diethylamido)zirconium Molecular Formula C16H40N4Zr Average Mass 379.74

Application areas