TDMAS (99.999% - Si)

N,N,N',N',N'',N''-Hexamethylsilanetriamine

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CAS Number 15112-89-7 IUPAC Name N,N,N',N',N'',N''-Hexamethylsilanetriamine Molecular Formula [(CH3)2N]3SiH Average Mass 161.32

Form

Liquid

Appearance

Colorless to light yellow

Assay (Purity)

99.8

Boiling Point

145-148°C

Sensitivity

Moisture, air

Signal

Danger

Pictograms

[(CH₃)₂N]₃SiH, Tris(dimethylamido)silane, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine

Other [ Si ] compounds

TEOS (99.999999% - Si)

Tetraethyl orthosilicate

CAS Number 78-10-4 IUPAC Name Tetraethyl orthosilicate Molecular Formula C8H20O4Si Average Mass 208.33

SiI4 (99.999% - Si)

Silicon tetraiodide

CAS Number 13465-84-4 IUPAC Name Silicon tetraiodide Molecular Formula SiI4 Average Mass 535.7

BTBAS (99.999% - Si)

Bis(t-butylamino)silane

CAS Number 186598-40-3 IUPAC Name Bis(t-butylamino)silane Molecular Formula C8H22N2Si Average Mass 174.36

SiBr4 (99.9999% - Si)

Tetrabromosilane

CAS Number 7789-66-4 IUPAC Name Tetrabromosilane Molecular Formula SiBr4 Average Mass 347.7

HCDSO (99.999% - Si)

Trichloro (trichlorosilyloxy) silane

CAS Number 14986-21-1 IUPAC Name Trichloro (trichlorosilyloxy) silane Molecular Formula Cl6OSi2 Average Mass 284.89

HCDS (99.9999% - Si)

Hexachlorodisilane

CAS Number 13465-77-5 IUPAC Name Hexachlorodisilane Molecular Formula Si₂Cl₆ Average Mass 268.89

TEMAH

Hafnium tetrakis[ethyl(methyl)azanide]

CAS Number 352535-01-4 IUPAC Name Hafnium tetrakis[ethyl(methyl)azanide] Molecular Formula C12H32HfN4 Average Mass 410.9

Application areas