Производство полупроводников

SiBr4 (99.9999% - Si)

Tetrabromosilane
SiBr4
CAS Number 7789-66-4 IUPAC Name Tetrabromosilane Molecular Formula SiBr4 Average Mass 347.7
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HCDSO (99.999% - Si)

Trichloro (trichlorosilyloxy) silane
Cl6OSi2
CAS Number 14986-21-1 IUPAC Name Trichloro (trichlorosilyloxy) silane Molecular Formula Cl6OSi2 Average Mass 284.89
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HCDS (99.9999% - Si)

Hexachlorodisilane
Si₂Cl₆
CAS Number 13465-77-5 IUPAC Name Hexachlorodisilane Molecular Formula Si₂Cl₆ Average Mass 268.89
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TEMAH

Hafnium tetrakis[ethyl(methyl)azanide]
C12H32HfN4
CAS Number 352535-01-4 IUPAC Name Hafnium tetrakis[ethyl(methyl)azanide] Molecular Formula C12H32HfN4 Average Mass 410.9
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TDMAT

Titanium(IV) tetrakis (dimethylazanide)
C8H24N4Ti
CAS Number 3275-24-9 IUPAC Name Titanium(IV) tetrakis (dimethylazanide) Molecular Formula C8H24N4Ti Average Mass 224.15
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PDMAT

Pentakis-(dimethylamino)-tantalum(V)
C10H30N5Ta
CAS Number 19824-59-0 IUPAC Name Pentakis-(dimethylamino)-tantalum(V) Molecular Formula C10H30N5Ta Average Mass 401.33
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Ta[EtO]5

Tantalum(V) ethoxide
C10H25O5Ta
CAS Number 6074-84-6 IUPAC Name Tantalum(V) ethoxide Molecular Formula C10H25O5Ta Average Mass 406.26
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