Производство полупроводников

TEPO

Triethyl phosphate
C6H15O4P
CAS Number 78-40-0 IUPAC Name Triethyl phosphate Molecular Formula C6H15O4P Average Mass 182.15
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PH3

Phosphine
PH3
CAS Number 7803-51-2 IUPAC Name Phosphine Molecular Formula PH3 Average Mass 34
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PF3

Phosphorous trifluoride
PF3
CAS Number 7783-55-3 IUPAC Name Phosphorous trifluoride Molecular Formula PF3 Average Mass 87.97
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CCTBA

3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl
C12H10Co2O6
CAS Number 56792-69-9 IUPAC Name 3,3-Dimethyl-1-butyne)dicobalt hexacarbonyl Molecular Formula C12H10Co2O6 Average Mass 368.07
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Co2(CO)8 (stabilized with 3-5% hexanes)

Dicobalt octacarbonyl
C8Co2O8
CAS Number 10210-68-1 IUPAC Name Dicobalt octacarbonyl Molecular Formula C8Co2O8 Average Mass 341.95
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Mo(CO)6

Molybdenum hexacarbonyl
C6MoO6
CAS Number 13939-06-5 IUPAC Name Molybdenum hexacarbonyl Molecular Formula C6MoO6 Average Mass 264.01
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MoOCl4

Molybdenum(VI) tetrachloride oxide
MoOCl4
CAS Number 13814-75-0 IUPAC Name Molybdenum(VI) tetrachloride oxide Molecular Formula MoOCl4 Average Mass 253.78
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