Production of semiconductors
SiBr4 (99.9999% - Si)
Tetrabromosilane
HCDSO (99.999% - Si)
Trichloro (trichlorosilyloxy) silane
CAS Number
14986-21-1
IUPAC Name
Trichloro (trichlorosilyloxy) silane
Molecular Formula
Cl6OSi2
Average Mass
284.89
More
HCDS (99.9999% - Si)
Hexachlorodisilane
CAS Number
13465-77-5
IUPAC Name
Hexachlorodisilane
Molecular Formula
Si₂Cl₆
Average Mass
268.89
More
TEMAH
Hafnium tetrakis[ethyl(methyl)azanide]
CAS Number
352535-01-4
IUPAC Name
Hafnium tetrakis[ethyl(methyl)azanide]
Molecular Formula
C12H32HfN4
Average Mass
410.9
More
TDMAT
Titanium(IV) tetrakis (dimethylazanide)
CAS Number
3275-24-9
IUPAC Name
Titanium(IV) tetrakis (dimethylazanide)
Molecular Formula
C8H24N4Ti
Average Mass
224.15
More
PDMAT
Pentakis-(dimethylamino)-tantalum(V)
CAS Number
19824-59-0
IUPAC Name
Pentakis-(dimethylamino)-tantalum(V)
Molecular Formula
C10H30N5Ta
Average Mass
401.33
More
Ta[EtO]5
Tantalum(V) ethoxide
CAS Number
6074-84-6
IUPAC Name
Tantalum(V) ethoxide
Molecular Formula
C10H25O5Ta
Average Mass
406.26
More