Production of semiconductors

(CH3)4Ge

Tetramethylgermanium
(CH3)4Ge
CAS Number 865-52-1 IUPAC Name Tetramethylgermanium Molecular Formula (CH3)4Ge Average Mass 132.73
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W(CO)6 (< 0.1% Mo)

Carbon monooxide - tungsten (6:1)
W(CO)6
CAS Number 14040-11-0 IUPAC Name Carbon monooxide - tungsten (6:1) Molecular Formula W(CO)6 Average Mass 351.92
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(Acac)3Fe

Iron acetylacetonate
Fe(C5H7O2)3
CAS Number 14024-18-1 IUPAC Name Iron acetylacetonate Molecular Formula Fe(C5H7O2)3 Average Mass 353.18
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(Acac)3Mn

Manganese(III) acetylacetonate
[Mn(C5H7O2)3]
CAS Number 14284-89-0 IUPAC Name Manganese(III) acetylacetonate Molecular Formula [Mn(C5H7O2)3] Average Mass 35217
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(Acac)2Ni

Nickel(II) acetylacetonate
Ni(C5H7O2)2
CAS Number 3264-82-2 IUPAC Name Nickel(II) acetylacetonate Molecular Formula Ni(C5H7O2)2 Average Mass 256.91
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TEMAZ

Tetrakis(ethylmethylamino)zirconium(IV)
C12H32N4Zr
CAS Number 175923-04-3 IUPAC Name Tetrakis(ethylmethylamino)zirconium(IV) Molecular Formula C12H32N4Zr Average Mass 323.63
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LiN3 (20% in H2O)

Lithium azide
LiN3
CAS Number 19597-69-4 IUPAC Name Lithium azide Molecular Formula LiN3 Average Mass 48.96
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