半导体材料的生产

TDEAHf

Tetrakis(diethylamino)hafnium
C16H40HfN4
CAS Number 19962-12-0 IUPAC Name Tetrakis(diethylamino)hafnium Molecular Formula C16H40HfN4 Average Mass 467.01
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Cp2HfCl2

Hafnocene dichloride
C10H10Cl2Hf
CAS Number 12116-66-4 IUPAC Name Hafnocene dichloride Molecular Formula C10H10Cl2Hf Average Mass 379.58
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TDEAZr

Tetrakis(diethylamido)zirconium
C16H40N4Zr
CAS Number 13801-49-5 IUPAC Name Tetrakis(diethylamido)zirconium Molecular Formula C16H40N4Zr Average Mass 379.74
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ZrCl4(THF)2

Tetrachlorobis(tetrahydrofuran)zirconium
C8H16Cl4O2Zr
CAS Number 21959-01-3 IUPAC Name Tetrachlorobis(tetrahydrofuran)zirconium Molecular Formula C8H16Cl4O2Zr Average Mass 377.25
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Zr(OiPr)4 isopropanol adduct

Zirconium Isopropoxide isopropanol complex
C15H36O5Zr
CAS Number 14717-56-7 IUPAC Name Zirconium Isopropoxide isopropanol complex Molecular Formula C15H36O5Zr Average Mass 387.67
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Cp2ZrClH

Bis(cyclopentadienyl)zirconium Chloride Hydride
C10H11ClZr
CAS Number 37342-97-5 IUPAC Name Bis(cyclopentadienyl)zirconium Chloride Hydride Molecular Formula C10H11ClZr Average Mass 257.87
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(HMDS)2ZrCl2

Dichlorobis[bis(trimethylsilyl)amino]zirconium
C12H36Cl2N2Si4Zr
CAS Number 70969-28-7 IUPAC Name Dichlorobis[bis(trimethylsilyl)amino]zirconium Molecular Formula C12H36Cl2N2Si4Zr Average Mass 482.9
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