半导体材料的生产

Hf(OiPr)4 isopropanol adduct

Hafnium isopropoxide isopropanol adduct
C12H28HfO4
CAS Number 2171-99-5 IUPAC Name Hafnium isopropoxide isopropanol adduct Molecular Formula C12H28HfO4 Average Mass 414.84
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(HDMS)2HfCl2

Bis(trimethylsilyl)amidohafnium(IV) dichloride
C12H36Cl2HfN2Si4
CAS Number 70969-29-8 IUPAC Name Bis(trimethylsilyl)amidohafnium(IV) dichloride Molecular Formula C12H36Cl2HfN2Si4 Average Mass 570.17
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TDMAH

Tetrakis(dimethylamido)hafnium(IV)
C8H24HfN4
CAS Number 19782-68-4 IUPAC Name Tetrakis(dimethylamido)hafnium(IV) Molecular Formula C8H24HfN4 Average Mass 354.79
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C12H32N4Ti

Bis(diethylamido)bis(dimethylamido)titanium(IV)
C12H32N4Ti
CAS Number 123798-13-0 IUPAC Name Bis(diethylamido)bis(dimethylamido)titanium(IV) Molecular Formula C12H32N4Ti Average Mass 280.28
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Ti(OtBu)4

tert-Butyl titanate
C16H36O4Ti
CAS Number 3087-39-6 IUPAC Name tert-Butyl titanate Molecular Formula C16H36O4Ti Average Mass 340.35
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TiCpCl3

(Cyclopentadienyl)titanium trichloride
C5H5Cl3Ti
CAS Number 1270-98-0 IUPAC Name (Cyclopentadienyl)titanium trichloride Molecular Formula C5H5Cl3Ti Average Mass 219.32
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TiCl4(THF)2

Tetrachlorobis(tetrahydrofuran)titanium(IV)
C8H16Cl4O2Ti
CAS Number 31011-57-1 IUPAC Name Tetrachlorobis(tetrahydrofuran)titanium(IV) Molecular Formula C8H16Cl4O2Ti Average Mass 333.89
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