半导体材料的生产

Cp2ZrH2

Zirconcene dihydride
C10H12Zr
CAS Number 37342-98-6 IUPAC Name Zirconcene dihydride Molecular Formula C10H12Zr Average Mass 223.43
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ZrCl4

Zirconium tetrachloride
ZrCl4
CAS Number 10026-11-6 IUPAC Name Zirconium tetrachloride Molecular Formula ZrCl4 Average Mass 233.03
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TEMAHf

Tetrakis(ethylmethylamino)hafnium
C12H32HfN4
CAS Number 352535-01-4 IUPAC Name Tetrakis(ethylmethylamino)hafnium Molecular Formula C12H32HfN4 Average Mass 410.9
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TDEAH

Tetrakis(diethylamino)hafnium
C16H40HfN4
CAS Number 19824-55-6 IUPAC Name Tetrakis(diethylamino)hafnium Molecular Formula C16H40HfN4 Average Mass 467.01
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HfBr4

Hafnium Tetrabromide
HfBr4
CAS Number 13777-22-5 IUPAC Name Hafnium Tetrabromide Molecular Formula HfBr4 Average Mass 498.11
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Hf(EtO)4

Hafnium tetraethanolate
C8H20HfO4
CAS Number 13428-80-3 IUPAC Name Hafnium tetraethanolate Molecular Formula C8H20HfO4 Average Mass 358.73
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(Me5Cp)2HfCl2

Bis(pentamethylcyclopentadienyl)hafnium dichloride
C20H30Cl2Hf
CAS Number 85959-83-7 IUPAC Name Bis(pentamethylcyclopentadienyl)hafnium dichloride Molecular Formula C20H30Cl2Hf Average Mass 519.86
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