半导体材料的生产
HCDS (99.9999% - Si)
Hexachlorodisilane
CAS Number
13465-77-5
IUPAC Name
Hexachlorodisilane
Molecular Formula
Si₂Cl₆
Average Mass
268.89
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TEMAH
Hafnium tetrakis[ethyl(methyl)azanide]
CAS Number
352535-01-4
IUPAC Name
Hafnium tetrakis[ethyl(methyl)azanide]
Molecular Formula
C12H32HfN4
Average Mass
410.9
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TDMAT
Titanium(IV) tetrakis (dimethylazanide)
CAS Number
3275-24-9
IUPAC Name
Titanium(IV) tetrakis (dimethylazanide)
Molecular Formula
C8H24N4Ti
Average Mass
224.15
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PDMAT
Pentakis-(dimethylamino)-tantalum(V)
CAS Number
19824-59-0
IUPAC Name
Pentakis-(dimethylamino)-tantalum(V)
Molecular Formula
C10H30N5Ta
Average Mass
401.33
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Ta[EtO]5
Tantalum(V) ethoxide
CAS Number
6074-84-6
IUPAC Name
Tantalum(V) ethoxide
Molecular Formula
C10H25O5Ta
Average Mass
406.26
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